Week1：
Transfer (1)
●Introduction to the functions and actions of EFEM Equipment Front End Module)
●Principles of robot action and correction
●Load port
Transfer (2)
●Types and evolution of FOUP (Front Opening Unified Pod)
●TSMC-Load port
●Vibration wafer sensor

Week2：
Gas/MFC
●MFC(Mass Flow Controller) introduction
●Gas filter
●MFC calibration implementation
Chemical
●Liquid pump introduction
●Types and principles of chemical filters
●Chemical material introduction
●Chemical valve

Week3：
Plasma
●Principle of PlasmaFormation
●Types and principles of plasma design
●Principle of DC bias
●Application of Plasma
Temperature
●Temperature effect and component types
●Chiller/ Heat-changer
●Types of Cooling chip/Coolant
●Introduction to the principle and function of ESC (Electrostatic Chuck)

Week4：
Specialty
●Coating techniques introduction
●OES (O ptical Emission Spectroscopy) principle and application
●e-Sensor
●Introduction to ionizer