Week 1：
1.System overview
2.Mainframe configuration
3.Process module
4.Utility connection
5.Sub-system
6.Safety
7.Tool on-site inspection

Week 2：
1.RF delivery system
2.Gas delivery system
3.Pressure servo system
4.ESC system
5.Backside He system
6.Temperature system
7.Chamber design evolution
8.EPD system introduction
9.Software operation overview

Week 3：
1.S/W operation main platform
2.S/W operation process module
3.S/W operation data access
4.Mainframe outline
5.Mainframe service function
6.Mainframe maintenance
7.Maintenance practice and certification

Week 3：
Specialty
1.Chamber outline and PM preparation
2.Process kits disassembling
3.Process kits cleaning and inspection
4.Process kits installation
5.PM practice